Abstract

ILU-8TP system was designed for electron beam curing of thick-film pastes in the frame of screen-and-fire technological process of production of hybrid integrated circuits (HIC). It comprises electron accelerator ILU-8 (electron beam energy 1 MeV, power 20 kW), X-ray shielding, three internal conveyors and associate support devices. The system cleans plates, dries and hardens thick-film coating, trims resistors. Electron beam treatment process lasts 40–60 seconds with maximum temperature of 1000 centrigrdes. Maximum productivity of ILU-8TP is 3000 plates per hour. Usage of ILU-8TP instead of baking oven permits to improve quality of thick-film components.

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