Abstract
Group-II fluorides (BaF2 and MgF2) insulators are deposited on hydrogenated (C–H) diamonds by E-beam evaporator at room temperature. The bandgaps, chemical bonds and band offsets of fluorides are investigated by the high-resolution X-ray photoelectron spectroscopy (XPS) measurements. The XPS results show bandgap energies of 9.4 ± 0.2 eV for BaF2 and 9.7 ± 0.2 eV for MgF2 by F 1s energy loss spectra. The valence band offsets (ΔEV's) of BaF2/MgF2 on the C–H diamond are determined as 5.2 ± 0.2 and 4.8 ± 0.2 eV, respectively. There are both type II energy band configuration for BaF2 and MgF2 on the C–H diamond with conduction band offsets of 1.3 ± 0.2 eV and 0.6 ± 0.2 eV, respectively. The relatively oxygen-weak or oxygen-free fluoride/C–H diamond interface and large ΔEV suggest that fluorides are an excellent gate dielectric for the C–H diamond field-effect transistors with high hole mobility and low gate leakage.
Published Version
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