Abstract
Abstract A method is described for forming nanostructured thin solid films consisting of regularly mixed titanium-aluminium oxide nanocomposites, with the self-organized root-like inner and column-like outer structures, derived from anodically oxidized Al/Ti bilayers sputter-deposited onto oxidized silicon wafers. The morphology, crystal structure and phase composition of the anodic films can be controlled and tailored during the film growth. The films are promising as fast-response NO2 sensing layers, the response and recovery times being as short as about 1 min.
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