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https://doi.org/10.1016/0167-9317(95)00034-6
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Cite Journal: Microelectronic Engineering |  Publication Date: Jun 1, 1995 |
 Citations: 22 |
Affiliation: Toshiba (Japan)
In this paper we discuss small-geometry MOSFETs with gate lengths below 0.1 μm and talk about the limits to the down-sizing of MOSFETs. We also consider future ULSIs containing such ultra-small-geometry MOSFETs.
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