Abstract
A small sized, versatile PIG ion source with end extraction is described by which positive ion beams of most of the elements can be produced with intensities in the microampere range. The source operates either with gas or with a mixture of gas and metal vapor. In the latter case the supply of the metal atoms to the gas discharge is done by evaporation or sputtering depending on the kind of metal. A characteristic feature of the source is the small power consumption so that cooling of the source housing by air only is sufficient.
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