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Abstract
The formation of quasicrystalline phase in vapor deposited Al 87 Mn 13 alloy film has been investigated by TEM. The as-evaporated film consists of an amorphous AlMn phase and polycrystalline Al. After annealing at moderate temperatures, icosahedral quasicrystalline phase is formed through the solid state reaction of the amorphous AlMn phase and Al. At higher temperatures the quasicrystalline transforms to the stable crystalline Al 6 Mn. The implantation of 30 KeV Si ions with dose of 5×10 15 / cm 2 to the annealed film promotes the formation of icosahedral phase.
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