Abstract
Thin films of palladium diacetate, palladium dichloride, and palladium dibromide on polyimide substrates have been irradiated with H +, H + 2, 3He +, 4He +, Ne +, ar +, Kr + and Xe + ion beams in the energy range from 35 keV to 2 MeV. Gas evolution was seen during bombardment, after which the films to various degrees appeared metal-like. Conductivity has been induced by heavy-ion bombardment, giving sheet-resistance values between 10 5 and 13 Ω/□ and resistivity values down to 50 μΩ cm for ion doses between 5 × 10 13 and 2.5 × 10 15 ions cm 2 . The mechanism of the ion-decomposition process has been investigated by high-energy, light-ion irradiations, and it was found to be related to both nuclear- and electronic-stopping processes, ruling out any beam-heating effects. The selectivity of the decomposition has been demonstrated, producing 5–6 μm features.
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