Abstract
A new method for the fabrication of periodic CNT arrays was developed in this study,which involves the use of the inverse nano-sphere lithography (INSL) process. Mo of ahoneycomb pattern, acting as a catalyst-poisoning layer, was produced by the nano-spherelithography (NSL) process; the Mo poisoned the catalyst and prevented CNT growth wheredeposited, and as a result, a periodic CNT pattern was obtained. Using this method, theuniformity of the CNT array can be improved by preventing the negative effect ofarrangement defects in self-assembled monolayers. The size and the period of the CNTarray can be adjusted by careful selection of the polystyrene (PS) sphere diameter. X-rayphotoelectron spectroscope (XPS) analysis revealed that the Co catalyst wasineffective on the areas of Mo deposition due to the diffusion of Co into the Mo layer.
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