The experimental study on regenerative heat transfer in high temperature air combustion

Abstract

For the purpose of decomposing the processing gases CF4 from semiconductor manufacturers, ceramic honeycomb regenerative burner system is suggested by using the principle of HTAC. A simulated high temperature air combustion furnace has been used to determine the features of HTAC flames and the results of the decomposition of CF4. The preheat air temperature of it is above 900°C. The exhaust gas released into the atmosphere is lower than 150°C. Moreover, the efficiency of recovery of waste heat is higher than 80%, the NOx level in exhaust gas is less than 198 mg/m3 and the distribution of temperature in the furnace is nearly uniform. The factors influencing on heat transfer, temperature profile in chamber and NOx emission were discussed. Also some CF4 can be decomposed in this system.