The Evolvement of Lithography Optics Towards Advanced EUV Lithography: Enabling the Continuation of Moore’s Law for Six Decades

Winfried Kaiser

https://doi.org/10.1109/med.2023.3343627

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Journal: IEEE Electron Devices Magazine	Publication Date: Mar 1, 2024
Citations: 1

Abstract

The Evolvement of Lithography Optics Towards Advanced EUV Lithography: Enabling the Continuation of Moore’s Law for Six Decades

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