The electrical behaviour of individual dislocations, shockley partials and stacking fault ribbons in silicon

Abstract

Listen

Translate article

The EBIC mode of the SEM has been used to study the electronic properties of individual dislocations in silicon at high spatial resolution. A theory of EBIC, relating the contrast to the fundamental defect parameters, such as the carrier lifetime in the vicinity of the defect, is presented. A means for the determination of defect energy levels at high spatial resolution is proposed. First results of a project designed to yield information on the energy levels associated with dislocations in Si are described. The first direct electrical observation of the individual Shockley partials of dissociated dislocations is also reported.