The Efficiency of Quartz Particles Evaporation in the Argon Plasma Flow of the RF Inductively Coupled Plasma Torch

Yu Grishin, L Miao

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https://doi.org/10.7463/0517.0001196

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Journal: Science and Education of the Bauman MSTU	Publication Date: May 3, 2017
Citations: 1	License type: cc-by

Abstract

The Efficiency of Quartz Particles Evaporation in the Argon Plasma Flow of the RF Inductively Coupled Plasma Torch

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