Abstract
An Au/n–InP/In diode has been fabricated in the laboratory conditions and the current–voltage (I–V) and capacitance–voltage (C–V) characteristics of the diode have been measured in room temperature. In order to observe the effect of the thermal annealing, this diode has been annealed at temperatures 100 and 200°C for 3min in N2 atmosphere. The characteristic parameters such as leakage current, barrier height and ideality factor of this diode have been calculated from the forward bias I–V and reverse bias C–V characteristics as a function of annealing temperature. Also the rectifying ratio of the diode is evaluated for as-deposited and annealed diode.
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