The effects of the simultaneous addition of diborane and ammonia on the hot-filament assisted chemical vapor deposition of diamond

Abstract

Abstract The effects of the simultaneous addition of diborane and ammonia on the nucleation density and growth rate of diamond prepared by hot-filament assisted chemical vapor depositions were examined. The diamond nucleation density and growth rate decreased as the B/C and N/B input ratios were increased owing to poisoning of the diamond surface and depletion of methyl radicals. This reduction in the amount of diamond could be compensated for by increasing the substrate and filament temperatures, and increasing the concentration of diamond growth species. Up to a B/C input reactant gas ratio of approximately 0.1, faceted diamond particles and an amorphous BCN continuous film were codeposited. For B C >0.1 , only the BCN film was formed.