Abstract
The effects of various solvents on the material properties of lead zirconate titanate (PZT) thin films were investigated. PZT films have been made from alkoxide precursor by sol-gel method using four kinds of solvent (2-methoxyethanol, iso-propyl alcohol, ethanol, and methanol). It was found that phase formation temperature decreases as molecular weight of solvent decreases. And the stock solution using light alcohol such as ethanol or methanol induced decrease of grain size and increase of (111) preferred orientation in PZT films. Furthermore, remnant polarization value was also decreased.
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