Abstract
A general form of the balance equation, to describe the variation of concentration of atomic species during ion bombardment of solids, is employed to reveal the influence of model parameters (atomic volumes and target relaxation) in determining atomic redistribution during high-fluence ion implantation. The study, firstly, of a simple case, ion implantation without mixing, allows us to obtain analytic solutions of the balance equation and to perform an analysis of parametric dependences due to atomic volume mismatch. We also show the effects of atomic mixing and relaxation on the target density, obtained via full numerical solution of the balance equation. The importance of specifying appropriate atomic volumes for the different species involved in the description of mixing is stressed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
