Abstract
On-chip integrated components provide generally area and power-reduction, but the poor quality of on-chip integrated inductors limits their use in RF circuits. Thus, there is an increased interest in improving the inductor characteristics. Onchip processed spiral inductors with outer ground plates and with patterned metal ground shields are studied. An inductor can be protected from outer stray-fields with a surrounding ground plate. The patterned ground shield can be processed under the inductor to diminish the substrate capacitance. The patterned shape of the shield eliminates eddy currents. The influence of the shield on the quality factor and the self-resonant frequency are studied. Experimental results show a clear advantage in the shielded inductor compared to the inductor without a shield. Furthermore, the small inductance values are not weakened due to patterned shield.
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