Abstract

This paper proposes a new layout for a silicon on-chip spiral inductor and analyzes the effectiveness of a ground shield that is considered to enhance the quality factor of a spiral inductor on a silicon chip. The effective series resistance becomes low when a ground shield is placed under a spiral inductor. Furthermore, a spiral inductor with a surrounding ground shield (SGS) does not significantly improve the quality factor, but a spiral inductor with a patterned ground shield (PGS) may do so.

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