Abstract

AbstractA study was made of the effects of hydrogen containing additives on the polymerization of tetrafluoroethylene in a radiofrequency low pressure plasma. The addition of ethylene and molecular hydrogen were found, under certain circumstances, to significantly increase the rate of polymer deposition. This effect is ascribed to the release of hydrogen atoms from the additive, which enhance the formation of fluorocarbon‐free radicals and scavenges fluorine atoms. ESCA (electron spectroscopy for chemical analysis) spectra of the deposited films show that upon addition of hydrogen to the monomer, the F/C ratio of the film decreases and the H/C ratio rises. Hydrogen addition also influences the extent of crosslinking—a decrease being observed at low discharge power and an increase being observed at high discharge power.

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