Abstract
Nanolayers of porous ZnSe with thickness of ∼50 nm were prepared by thermal vacuum evaporation, applying continuous and periodically interrupted deposition at different deposition rates. The surface morphology and film composition are studied by SEM and EDS methods. The XRD and Raman scattering measurements are used to confirm zinc blende ZnSe crystal structure. The Phonon confinement model is modified to analyze the Raman spectra excited by different laser lines both in non-resonant and near-resonant conditions. This analysis provides more profound insight in the ZnSe layers composition, nanocrystallite size and crystal lattice strain. The Raman results are also supported by the spectroscopic ellipsometry regarding the energy gap and porous properties of ZnSe layers. This study shows that both manner and rate of deposition significantly affect the nanolayers structure, morphology and optical properties and provide preparation of films with properties suitable for application which requires specific porous parameters important for the films chemical sensitivity.
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