Abstract
In this study, we report on phase fractions and nitrogen distribution among structure components of stainless steel films that are sputter-deposited from an 316L target under Ar+N2 atmospheres. As N2 flow rate was increased were obtained samples with the following structures: BCC (N-lean), BCC plus FCC (between 2.0 and 6.0Nat.%), and fully FCC (11.5Nat.% and higher N-contents). Experiments under two different sets of deposition conditions were carried out, where the actual relationship between phase fractions and N2 flow rate showed differences among the two experimental sets of samples. N-content in the FCC phase in duplex structures varied between 3 and 9at.%. An equilibrium with constrained atomic partitioning of substitutional species and full atomic partitioning of nitrogen was proposed, with the aim of depicting the structures observed.
Published Version
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