Abstract
Abstract The effects of thickness in metal–semiconductor field effect transistor (MESFET) GaAs buffer on the device electrical performance and reliability have been investigated. Devices studied are 0.8-μm-gate GaAs MESFETs at different buffer thickness of 0.5 and 0.3 μm from similar MBE-grown processes. Three-terminal off-state breakdown measurements indicate that a substantial enhancement in the observed breakdown current for thinner-buffer MESFETs is attributed to the drain–source leakage or breakdown through the channel–substrate interface while the device is at pinch-off. DC and RF biased stress lifetests up to 323 °C channel temperature have been performed to accelerate the degradation mechanisms. It is found that the device degradation rate has little dependence on buffer thickness when stressed at a reversed gate–drain voltage below ∼70% of its breakdown threshold. The differences grow rapidly when biased close to the breakdown field because of the development of channel–substrate current in thinner buffer materials.
Published Version
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