Abstract
The effects of annealing temperature on microstructure, remnant polarization (2Pr), leakage current and residual stress in Bi3.15Nd0.85Ti3O12 (BNT) thin films prepared by metal-organic decomposition were studied. The best surface features was observed, and the largest 2Pr (63.2 μC cm−2 under 530 kV cm−1) and lowest leakage current (1.32 × 10−5 A cm−2 under 125 kV cm−1) of the film were obtained with annealing at 700 °C. Moreover, the strong residual tensile stress in BNT thin film causes surface fracture and ferroelectric degradation.
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