Abstract

Semi-insulating Gallium nitride was irradiated by fast and thermal neutrons with fluences from 1014 to 1016 n/cm2. Depth-resolved cathodoluminescence spectroscopy was used to determine defects changes before and after irradiation. The results revealed two kinds of defects affected near-band emission recombination from two opposite directions. One was attributed to irradiation-induced N vacancies that contribute to near-band emission recombination. Another was attributed to irradiation-induced deep level defects that contribute to sub-band gap recombination and thus decrease the near-band emission recombination.

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