Abstract

A method of higher-order Laue zone line position measurement in convergent-beam electron diffraction (CBED) is proposed based on Hough transformation. A thorough analysis of the errors introduced by this measurement procedure is performed and their influence on the accuracy of lattice parameter determination is estimated. A criterion is derived which enables the accuracy to be predicted before experimental measurements are made and, thus, allows the selection of the best CBED geometry for parameter measurement.

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