Abstract
Study of ZnO / Cu / ZnO multilayer film stack using Cu film as a sandwich layer, in order to improve the overall performance of the transparent conductive film, structural, electrical and optical properties. ZnO / Cu / ZnO multilayer films prepared at room temperature by a DC and RF magnetron sputtering technique. The results showed that ZnO / Cu / ZnO multilayer film has good crystalline properties. With an increasing Cu layer thickness, a visible light transmittance of the multilayer film is reduced, while the electrical performance improved significantly. In the Cu layer thickness of 20nm, ZnO / Cu / ZnO multilayer film optoelectronic integrated for optimal performance
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