Abstract
In the present work the effect of the different concentrations of HF:ethanol (1:1, 1:2, 1:3, 1:4, 1:5) on the properties of porous silicon was studied by using porous silicon prepared from n-type and p-type bulk silicon of resistivity (1–10 Ω.cm) and HF (39–43%) and ethanol (99%) in 10 min and 10 V with electro-chemical etching for p-type and photo electro chemical etching for n-type. Furthermore, the layer thickness and porosity were studied by using graph metric method and SEM for porous silicon from n-type and p-type.
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