The Effect of Shallow Trench Isolation and Sinker on the Performance of Dual-Gate LDMOS Device

Abstract

In this paper, a dual-gate laterally double-diffused metal–oxide–semiconductor (DG-LDMOS) device with shallow trench isolation (STI) and sinker at the source side has been proposed. STI and sinker help to provide isolation and reduce the leakage current, respectively, in the device. This is an improvement over a single-gate (SG) LDMOS device when only one gate is used and no STI and sinker are there. The study of both the devices has been carried out using the ATLAS SILVACO simulator. In the simulation studies, all the dimensions and doping parameters of both devices have been kept the same except gate length and channel doping. The distance between two gates of DG-LDMOS device has been kept smaller. This has been done to overcome the island and overlapping issues. The simulation studies have shown a significant improvement in DG-LDMOS device parameters in comparison to the SG-LDMOS device. The DG-LDMOS device provides high breakdown voltage, low ON-resistance, high $f_{\sf {T}}$ and $f_{\sf {max}}$ , low drain-induced barrier lowering, and better output conductance as compared to conventional SG-LDMOS device. These features make the DG-LDMOS device an excellent candidate for RF applications.