Abstract
This paper reports the results of an experimental study of effect of SF6 on ozone generation within a Dielectric Barrier Discharge (DBD) fed by both pure oxygen and dry air. The chemical reaction mechanisms relevant to the process of ozone generation (and destruction) are discussed. The experimental results show the oxygen source should avoid the presence of SF6 but the addition of a small amount of SF6 in an air discharge can improve ozone concentration and ozone produce efficiency.
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