Abstract
In recent years, there is an increasing interest in development of micropumps for various applications in the chemical, medical and biomedical fields. Various researchers have tried to design and develop micropumps to handle small and accurate quantity of fluid. This paper focuses on the analysis of a piezoelectric actuator based micropump. Fluid is sucked inside the micropump by actuation of piezoelectric bimorph. Due to motion of bimorph, back pressure is generated inside the pump, causing the fluid to flow. Simulations are performed using ANSYS 12.1® at an applied voltage of 20 V and varying operating frequency. The simulation results show that the performance of micropump in terms of flow rate is a function of bimorph deflection, which depends on applied frequency. Effect of microneedle diameter and applied frequency on flow rate has been analyzed and discussed.
Published Version
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