Abstract
Mg‐doped zinc titanate (ZnTiO3) films were prepared using RF magnetron sputtering. Subsequent annealing of the as‐deposited films was performed at a temperature ranging from 600 to 900∘C for 2 hours with a heating rate of 5∘C/min in air. It was found that the as‐deposited films were amorphous and contained 2.77 at.% magnesium. This was further confirmed by the onset of crystallization that took place at annealing temperatures of 600∘C. The results showed that single Zn2Ti3O8 phase was existed at 600∘C. When annealing is at 700∘C, the results revealed that mainly a hexagonal ZnTiO3 phase accompanying a Zn2Ti3O8 minor phase was observed. When annealing is at 900∘C, the results showed that single hexagonal ZnTiO3 phase is stable at 900∘C. It means that ZnTiO3 phase containing no Mg is unstable at 900∘C and is decomposed from hexagonal ZnTiO3 to cubic Zn2TiO4 and rutile TiO2 at 900∘C. In addition, the effect of oxygen partial pressure for the films deposited on the phase transformations and microstructures of zinc titanites thin film was investigated.
Highlights
As the need for versatile electronic components with high reliability increases, the development of high-frequency electronic materials becomes imperative
The effects of Mg doping on zinc titanate thin films were investigated using a variety of analytical tools
The microstructure and phase transformation of zinc titanate thin films can be influenced by doping Mg
Summary
As the need for versatile electronic components with high reliability increases, the development of high-frequency electronic materials becomes imperative. Zinc titanate (ZnTiO3) has been reported to have specific electrical properties that are adequate for applications in microwave dielectrics [1,2,3]. The ZnO-TiO2 system exists in three forms: zinc metatitanate (ZnTiO3) with a hexagonal ilmenite structure; zinc orthotitanate (Zn2TiO4) with a cubic spinel crystal structure; zinc polytitanate (Zn2Ti3O8) with a cubic defect spinel structure [4]. [5] have reported on Zn2Ti3O8 materials, a low-temperature form of ZnTiO3 existing at temperature 945◦C [7]. A ZnTiO3 singlephase compound can be prepared by zinc oxide and rutile hydrate at T = 850 ∼ 900◦C [4]
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