Abstract
In this work, CeO2 seed layers have been deposited on RABiTS substrates by pulsed laser deposition (PLD) in a reel-to-reel chamber. We have systematically investigated the effect of laser energy and target–substrate distance on the quality of CeO2 seed layers. It was found that the orientation of CeO2 thin films was very sensitive to laser energy and target–substrate distance. X-ray diffraction (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM) were used to investigate how to exactly control the (00l) orientation and get smooth surface morphology. Through this work, we achieved optimum condition of pure c-axis oriented of CeO2 seed layer.
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