Abstract
In this paper, the influence of oxygen pres- sure on film quality and superconducting properties of YBa2Cu3O7−δ(YBCO-Y123) thin films prepared by Pulsed Laser Deposition (PLD) was investigated. For this purpose, YBCO thin films were deposited on polished LaAlO3 (l00) (LAO) substrates at three different oxygen pressures (150, 200, and 250 mTorr). X-Ray Diffraction (XRD) and Scan- ning Electron Microscopy (SEM) techniques were used to make comparative studies of film microstructure. Except for oxygen pressures, all other variables such as number of pulses, repetition rate, deposition temperature, heating and cooling rate, target-substrate distance, laser excitation energy, annealing temperature, and annealing pressure were fixed. For this fixed set of parameters, SEM, XRD analy- sis, and AC susceptibility measurements of these films re- vealed that the crystal structure quality and superconducting
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