Abstract
Pulsed laser deposited (Ba, Sr)TiO3 (BST) thin ferroelectric films, developed for use in pyroelectric detectors, have been grown on single crystal SrTiO3 substrates at temperatures ranging from 580 to 780°C. Temperature-dependent capacitance-voltage measurements reveal Curie temperature shifts of more than 50 K. However the Curie temperature does not shift monotonically with growth temperature. With increasing deposition temperature, the BST films transform from amorphous to epitaxial. Within the epitaxial growth regime, an increase in deposition temperature results in an increase in crystalline column size. These structural changes alter both the type and magnitude of film stress, resulting in shifts in Curie temperature and, consequently, the optimal pyroelectric detector operating temperature.
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