Abstract
We report the synthesis of (Ba,Sr)TiO3 (BST) thin films using plasma-activated pulsed laser deposition (PA-PLD) in oxygen ambient. In the PA-PLD system, an RF inductive coil was placed between a target and a substrate, to which RF power of about 50 W was supplied. A SiO2 tube was positioned in the coil to confine the plasma particles. The BST films were deposited on SrTiO3 (100) substrates at various temperatures by PA-PLD and the conventional PLD method. X-ray diffraction results show that the films deposited by both methods were highly oriented in the (100) direction, and the crystallinity of conventional PLD films was slightly better than that of PA-PLD films. However, atomic force microcopy observation showed the surface morphology of the PA-PLD films was smoother than that of conventional PLD films. The leakage current characteristics of PA-PLD films were also effectively improved compared to those of conventional PLD.
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