Abstract

The effect of P-doping and grain size of polycrystalline 3C–SiC on the infrared reflectance spectra is reported. The relationship between grain size and full width at half maximum (FWHM) suggest that the behavior of the 3C–SiC with the highest phosphorous doping level (of 1.2×1019at.cm−3) is different from those with lower doping levels (<6.6×1018at.cm−3). It is also further demonstrated that the plasma resonance frequency (ωp) is not influenced by the grain size.

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