Abstract
The effect of fluctuations in the lateral period of a nonideal multilayer grating on the scattering of hard synchrotron radiation (X-ray frequency range) was studied. Maps of the angular distribution of the coherent and diffuse scattering intensity in the reciprocal space are constructed. Theoretical diffraction curves calculated for a Ni/C multilayer grating are compared to the experimental data obtained by high-resolution triple-axis diffractometry. It is shown that good agreement between theory and experiment is observed for a fluctuation dispersion within 3% of the average lateral period of the grating.
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