The Effect of Deposition Temperature on Ba<sub>0.8</sub>Sr<sub>0.2</sub>TiO<sub>3</sub> Films Prepared by Pulsed Laser Deposition Technique

Abstract

Barium strontium titanate (Ba0.8Sr0.2TiO3) thin films have been prepared by pulsed laser deposition (PLD). The thin film of (Ba0.8Sr0.2TiO3) was deposited on a silicon (Si) substrate with different deposition temperatures. The XRD pattern identifies these specimens as being of the tetragonal phase. As the deposition substrate temperature varied from 200 °C to 400 °C, the average crystal size of BST increased from 34 nm to 68 nm calculated by the XDR pattern. Field (FESEM) images have estimated the particle size of the film. The dielectric constant increased with increasing substrate temperature.