The Effect of CU Intermediate Layer made by IBAD on the CU Surface Film of E–Gun Evaporation

Abstract

ABSTRACTCu intermediate layers (IL) by argon ion beam assisted deposition(IBAD) between substrates and Cu surface films (SF) deposited by electron-gun were made and their effect on the microstructure and properties of the Cu surface films were studied. Primary deposition variables were ion energy and substrates type. Trends in crystallographic texture, crystal-size and resistivity of Cu surface films with different IBAD layers on different substrates are significantly different. Analyzed by RBS, and XRD, the IBAD intermediate layer changed the crystallinity of Cu SF and increased the interface adhesion between the Cu SF and substrate. The experimental results shows that films with lower resistivity and better interface adhesion could be obtained by IBAD- PVD combined technique. The mechanism of crystallographic texture formation is also discussed.