Abstract
Amorphous Al2O3 coating was prepared on Ni-based single crystal superalloy via atomic layer deposition (ALD) for high temperature oxidation protection. The oxygen inward transport and outward-cation diffusion were hindered by amorphous Al2O3 coating, and the coated alloy showed high oxidation resistance. The low oxygen partial pressure at the alloy/coating interface altered the alloy oxidation behavior, allowing the priority oxidation of protective Al and Cr elements. The oxidation process was controlled by the growth of Cr2O3 and Al2O3. The coating exhibited high spallation resistance. Degradation of the coating, the formation of NiAl2O4 phase in amorphous Al2O3 layer, was observed.
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