Abstract
The effect of AlN underlayer on c-axis orientation of barium ferrite thin films and their magnetic properties have been investigated. On the AlN underlayer with a thickness of 30 nm, barium ferrite film with a thickness of 50 nm was deposited at room temperature. As the deposited barium ferrite film was not crystallized, it was post-annealed at 800°C for 5 h in air. The c-axis of crystallized barium ferrite was oriented perpendicular to the film surface that was caused by the effect of the AlN underlayer.
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