The Dynamics of MEMS Arches of Non-Ideal Boundary Conditions

Abstract

We present an investigation into the dynamics of MEMS arches when actuated electrically including the effect of their flexible (non-ideal) supports. First, the eigenvalue problem of a nonlinear Euler-Bernoulli shallow arch with torsional and transversal springs at the boundaries is solved analytically. Several results are shown to demonstrate the possibility of tuning the theoretically obtained natural frequencies of an arch to match the experimentally measured. Then, simulation results are shown for the forced vibration response of an arch when excited by a DC electrostatic force superimposed to an AC harmonic load. Shooting technique is utilized to find periodic motions. The stability of the captured periodic motion is examined using the Floquet theory. The results show several jumps in the response during snap-through motion and pull-in. Theoretical and experimental investigations are conducted on a microfabricated curved beam actuated electrically. Results show softening behavior and superharmonic resonances. It is demonstrated that non-ideal boundary conditions can have significant effect on the qualitative dynamical behavior of the MEMS arch, including its natural frequencies, snap-through behavior, and dynamic pull-in.