Abstract
This study analyses the microstructure of monocrystalline silicon after indentation with a Berkovich and spherical indenter. Transmission electron microscopy on cross section view samples was used to explore the detailed distributions of various phases in the subsurfaces of indented silicon. It was found that an increase of the P max would promote the growth of the crystalline R8/BC8 phase at the bottom of the deformation zone. Microcracks were always generated in the range of the P max studied. It was also found that the deformation zones formed by the Berkovich and spherical indenters have very different phase distribution characteristics. A molecular dynamics simulation and finite element analysis supported the experimental observations and suggested that the distribution of the crystalline phases in the transformation zone after indentation was highly stress-dependent.
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