Abstract
This work is concerned with the development of “cermet” film resistors prepared by deposition in vacuum. Cermets are metal/metal oxide/insulator mixtures having resistivities many times that of conventional deposited resistive materials. The preparation of samples of thickness 500 nm having resistivities ranging from 1 kΩ/sq. to 1 MΩ/sq. is described, attention is directed towards a two-boat evaporation system, and also to an electron beam source. The properties of the samples are discussed, in particular both their long- and short-term stability, their conduction mechanisms, and methods of adjusting the temperature coefficient of resistance; final values being obtained between 0 and +30 ppm/°C, by a vacuum annealing process. The principal cermet studied is a chromium/silicon oxide system, but a brief mention is made of other interesting systems.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
