Abstract
A method is presented that allows the simultaneous direct determination of the lattice parameter a 0 and the strains of stressed thin films, independently of an unstressed reference sample with the same value of a 0. The method employs a thin film Guinier camera in subtracting backscattering geometry using Seemann-Bohlin focusing. A wide range of diffraction angles is covered. The strain is measured over a range of angles, not just normal to the layer. Applications of the method to evaporated silver, gold, Nb 3Ge, niobium and vanadium films are presented.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
