Abstract
In this study, a flexible tactile sensing array based on a capacitive mechanism was designed, fabricated, and characterized for sensitive robot skin. A device with 8 × 8 sensing units was composed of top and bottom flexible polyethyleneterephthalate (PET) substrates with copper (Cu) electrodes, a polydimethylsiloxane (PDMS) dielectric layer, and a bump contact layer. Four types of microstructures (i.e., pyramids and V-shape grooves) atop a PDMS dielectric layer were well-designed and fabricated to enhance tactile sensitivity. The optimal sensing unit achieved a high sensitivity of 35.9%/N in a force range of 0–1 N. By incorporating a tactile feedback control system, the flexible sensing array as the sensitive skin of a robotic manipulator demonstrated a potential capability of robotic obstacle avoidance.
Highlights
In the past few decades, the development of intelligent robots has received increasing attention in research, industry, and family life [1]
Intelligent robot skin with tactile sensing capability can help robots operate in unknown environments and safely interact with people and objects [2]
We present an 8 × 8 flexible tactile sensing array as robot skin based on a capacitive sensing mechanism
Summary
In the past few decades, the development of intelligent robots has received increasing attention in research, industry, and family life [1]. Flexible tactile sensors can be classified into several sensing mechanisms, which are capacitive [3,4,5,6], piezoresistive [7,8,9,10], piezoelectric [11,12,13], thermoelectric [14], triboelectric [15,16], and other functional materials with sensing characteristics [17,18,19,20]. Researchers from the University of Cambridge [21] presented a typical capacitive sensor, consisting of top and bottom gold electrodes and a silicone rubber dielectric layer. When an external force was applied, the distance between the gold electrodes decreased and the capacitance increased . The pressure sensitivity of the device was 1.4%/N at most, which was relatively low for a practical application
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