The deposition of alumina, silica and magnesia films by electron bombardment evaporation: B Lewis, Microelectronics & Reliab, 3 (2), 1964, 109–120

doi:10.1016/0042-207x(65)91724-0

The deposition of alumina, silica and magnesia films by electron bombardment evaporation: B Lewis, Microelectronics & Reliab, 3 (2), 1964, 109–120

https://doi.org/10.1016/0042-207x(65)91724-0

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Journal: Vacuum

Publication Date: Mar 1, 1965

#Electron Bombardment Evaporation #Deposition Of Alumina #Magnesia Films #Deposition Of Silica #Deposition Of Films #Silica Films #Alumina Films #Electron Bombardment

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The deposition of alumina, silica and magnesia films by electron bombardment evaporation: B Lewis, Microelectronics & Reliab, 3 (2), 1964, 109–120

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The deposition of alumina, silica and magnesia films by electron bombardment evaporation: B Lewis, Microelectronics & Reliab, 3 (2), 1964, 109–120