The dependence of ellipsometric parameters Δ and Ψ on refractive index of superficial film

Abstract

The ellipsometrical analysis of external specular reflection of light on non-absorbing superficial films allows us to know factors which influence the ellipsometric measurement of the analyzed system. For optical non-absorbing superficial films the curves Δ = f(Ψ) are closed, the curves Δ = f(df) and Ψ = f(df) are periodical, while the curves Δ = f(nf) and Ψ = f(nf) are pseudo-periodic. Observations on the dependence of the ellipsometric parameters Δ and Ψ on nf are presented.