Abstract
In a unified transport system, traffic jams and vehicle deadlocks reduce efficiency causing the vehicles involved in it to cease moving. Deadlocks, in particular, halt the flow of vehicles. Therefore, predicting the possibility of a deadlock, identifying it and automatically resolving it are critical to improving lot delivery time. This paper proposes a method to detect a variety of deadlock phenomena in a unified transport system of 300 mm fab, thereby effectively improving lot delivery time.
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