The Crystallization Behavior of (Sr,Ba)Nb 2 O 6 Thin Films Prepared by a Hybrid Metalorganic Decomposition

Abstract

Strontium barium niobate (SBN) thin films with a nominal composition of Sr x Ba 1 m x Nb 2 O 6 (x=0.3, 0.5, 0.7) were prepared by a hybrid metalorganic decomposition process in which the complex solution was spin-coated onto Si(100) and fused silica substrates and heat-treated at temperatures between 650 and 900°C. Uniform and stable solutions were obtained from Sr-neodecanoate, Ba-neodecanoate and Nb-ethoxide, using a mixture of xylene and 2-methoxyethanol as the solvent. It was found that single phase SBN films with tetragonal tungsten bronze structure could be obtained at an annealing temperature as low as 700°C.